Innovation、Integration、Solutions - MOS Technology Inc.
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Laser Micro Machining 雷射精微加工系統 |
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microVEGA™ xMR - High-Throughput Selective Laser Annealing System for Magnetic Sensor Manufacturing |
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The microVEGA™ xMR system provides high-throughput laser annealing for monolithic magnetic sensor formation. Incorporating a highly flexible, high-throughput tool configuration with on-the-fly spot and variable laser energy, the microVEGA™ xMR can accommodate both Giant Magnetoresistance (GMR) and Tunnel Magnetoresistance (TMR) sensors, as well as easily adjust magnetic orientation, sensor position and sensor dimension - making it an ideal solution for magnetic sensor production. |
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Features:
- Single platform for both GMR and TMR sensors
- High throughput - up to 500,000 sensors per hour
- Very high energy homogeneity - resulting in improved sensor quality
- Accommodates wafer sizes up to 300 mm
- Flexible recipe programming and wide parameter range including
pulse energy, sensor dimensions, distance between sensors, magnetic
orientation and magnetic flux
- System accuracy: ± 5 μm
- Accuracy of magnetic field direction (orientation): ± 0.010°
- No consumables or product-specific parts required
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Suited for:
Adjustment of magnetic orientation, sensor position and sensor dimension for
- Giant Magnetoresistance (GMR) sensors and
- Tunnel Magnetoresistance (TMR) sensors
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