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Innovation、Integration、Solutions - MOS Technology Inc.

Laser Micro Machining 雷射精微加工系統

 
microVEGA™ xMR - High-Throughput Selective Laser Annealing System for Magnetic Sensor Manufacturing
 

The microVEGA™ xMR system provides high-throughput laser annealing for monolithic magnetic sensor formation. Incorporating a highly flexible, high-throughput tool configuration with on-the-fly spot and variable laser energy, the microVEGA™ xMR can accommodate both Giant Magnetoresistance (GMR) and Tunnel Magnetoresistance (TMR) sensors, as well as easily adjust magnetic orientation, sensor position and sensor dimension - making it an ideal solution for magnetic sensor production.

 
Features:
  • Single platform for both GMR and TMR sensors
  • High throughput - up to 500,000 sensors per hour
  • Very high energy homogeneity - resulting in improved sensor quality
  • Accommodates wafer sizes up to 300 mm
  • Flexible recipe programming and wide parameter range including
    pulse energy, sensor dimensions, distance between sensors, magnetic
    orientation and magnetic flux
  • System accuracy: ± 5 μm
  • Accuracy of magnetic field direction (orientation): ± 0.010°
  • No consumables or product-specific parts required
Suited for:
Adjustment of magnetic orientation, sensor position and sensor dimension for
  • Giant Magnetoresistance (GMR) sensors and
  • Tunnel Magnetoresistance (TMR) sensors
 
 
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Innovation、Integration、Solutions - MOS Technology Inc.
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