• Evatec:
Evatec Ltd is a global leading supplier of thin film deposition to semiconductor and optics industries. She manufactures the well known BAK deposition and etch systems as well as the MSP Sputter Tool and Radiance cluster tool to enable manufacturers to produce the world's most advanced chips, filters and lenses.

• Products:
-BAK series Evaporator( latest application: LED back side reflector & DBR deposition)
-MSP sputter Tool and Radiance Cluster Tool Sputter ( latest  application: LED ITO & DBR deposition)
-New component and retrofit

• Corial:
CORIAL is a process company that designs and manufactures plasma etching and deposition systems with innovative solutions dedicated to the semiconductor compounds, optoelectronics, LED, OLED and MEMS industries

• Products:
-200 Series  ICP, RIE, PECVD, ICPCVD, DECR
-300 Series  RIE, PECVD, ICP (Corial 300 IL especially for PSS)

• Jenoptik Solas:
Provide laser/mechanical structuring, edge deletion, and drilling systems for thin film solar.
And also provide drilling, edge isolation, doping, and ablation for crystalline silicon wafer based solar.