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Innovation、Integration、Solutions - MOS Technology Inc.
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Evatec Ltd is a global leading supplier of thin film deposition to semiconductor and optics industries. As home of Balzers BAK evaporator, manufactures the well known BAK deposition and etch systems. With the launch of the MSP Sputter Tool and Radiance cluster tool we enable semiconductor and optical devices manufacturers to produce the world's most advanced chips, filters and lenses. |
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| Sputter Technology for Semiconductor, Optical, Optoelectronics and LED industry |
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- Compact footprint
- Different substrate forms
- simultaneously
- Simple operation and maintenance
- Custom configuration
- Six-sided- hexagonal batch module for
- deposition, heating, etch or metrology
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| Evaporator Technology for Semiconductor, Optics and LED industry |
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- Thermal sources
- Ion & Plasma source for etch and deposition
- Low thermal load to better process fragile thin wafers
- Back and front side heating
Special sources and feed systems for thick layers
- Full range of custom substrate holders and handling
systems
- Wide range of applications: SAW,LEDs, MEMS,
Power Device, Optics, Photovoltaics, Sensors
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Evatec specializes in high throughput applications for metal "Lift Off" processes for the III-V market that require the most accurate control of film deposition profile. We offer both batch systems and the Samson split chamber system with the required extended throw geometries. |
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