Innovation、Integration、Solutions

Evatec Ltd is a global leading supplier of thin film deposition to semiconductor and optics industries. As home of Balzers BAK evaporator, manufactures the well known BAK deposition and etch systems. With the launch of the MSP Sputter Tool and Radiance cluster tool we enable semiconductor and optical devices manufacturers to produce the world's most advanced chips, filters and lenses.

Sputter Technology for LED industry

ITO sputtering
DBR sputtering

Perfect ITO quality by Magnetron Sputtering Technology

No( or extremely low) damage to underlayer-GaN
Very good Specific Resistance of Film
Very good Transmission of Film
Very low “RMS”-roughness of Film
Improved Step-coverage to Evaporation Technology

Evaporator Technology for LED industry

TCO deposition: ITO
Heat Sink: Ti-Pt-AuSn
Contact layer deposition: Metal
Ion assisted deposition process
Back side reflector: Metal Mirrors,
Dielectric Mirrors