Innovation、Integration、Solutions

SolR

In 2009 LayTec launched its first in-line monitoring system for photovoltaic thin-film applications – SolR.

SolR provides a unique approach to monitoring thin-film PV processes that greatly improves traditional off-line and batch sampling methods. It is an in-line system that is capable of measuring the properties and thickness of all layers – transparent con- ducting oxide (TCO), absorber and buffer layers – throughout the complete solar cell manufacturing process.

Fig. 1: optical head of SolR on a roll-to-roll deposition system for monitoring of the CIGS thickness

SolR provides in-line access to key thin-film process parameters:
• in-line film thickness measurements of all layers including semiconducting, di- electric and organic films
• TCO conductivity fingerprints
• separation of refractive index and film thickness for SiNx layers
• on-line process homogeneity checks
• roughness and texture characterization for c-Si, poly-Si and TCO
• in-line haze measurements of TCOs

The company is now cooperating with numerous partners to further develop cutting edge in-situ and in-line metrology solutions for the complete range of photovoltaic thin-film processes.

With our thin-film PV-cell in-line products producers have realized a lot of benefits: production anomalies are quickly identified and corrected, development cycles are accelerated, transfer and ramp up of established processes to new lines are facili- tated and conditions are easily re-established after maintenance. This all adds up to greater yields and reduced costs – the most important factor in today’s PV cell pro- duction!