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瀚笙科技:專注於太陽能、再生能源、光電子技術及半導體市場，以革新、整合、解決為企業經營理念
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瑞商Evatec 公司是一個全球知名領導品牌製造供應商，專精於半導體與光學薄膜沉積鍍膜設備及製程之研發與製造。 身為聞名世界Balzers BAK 蒸鍍機的發源地，生產廣受好評的BAK 蒸鍍沉積與蝕刻設備。隨著MSP Sputter Tool 與 Radiance cluster 濺鍍機系統的推出，我們成功幫助半導體與光學元件製造商生產出世界上最先進的半導體晶片，光學濾膜與鏡片。 |
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| Sputter Technology for Semiconductor, Optical, Optoelectronics and LED industry |
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- Compact footprint
- Different substrate forms
- simultaneously
- Simple operation and maintenance
- Custom configuration
- Six-sided- hexagonal batch module for
- deposition, heating, etch or metrology
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| Evaporator Technology for Semiconductor, Optics and LED industry |
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- Thermal sources
- Ion & Plasma source for etch and deposition
- Low thermal load to better process fragile thin wafers
- Back and front side heating
Special sources and feed systems for thick layers
- Full range of custom substrate holders and handling
systems
- Wide range of applications: SAW,LEDs, MEMS,
Power Device, Optics, Photovoltaics, Sensors
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Evatec specializes in high throughput applications for metal "Lift Off" processes for the III-V market that require the most accurate control of film deposition profile. We offer both batch systems and the Samson split chamber system with the required extended throw geometries. |
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