Sputter Technology for LED industry

• ITO sputtering
• DBR sputtering

Perfect ITO quality by Magnetron Sputtering Technology

• No( or extremely low) damage to underlayer-GaN
• Very good Specific Resistance of Film
• Very good Transmission of Film
• Very low “RMS”-roughness of Film
• Improved Step-coverage to Evaporation Technology

Evaporator Technology for LED industry

• TCO deposition: ITO
• Heat Sink: Ti-Pt-AuSn
• Contact layer deposition: Metal
  Ion assisted deposition process
• Back side reflector: Metal Mirrors,
  Dielectric Mirrors